GaAs nano-ridge laser diodes fully fabricated in a 300-mm CMOS pilot line
Arrazola, J. M. et al. Quantum circuits with many photons on a programmable nanophotonic chip. Nature 591, 54–60 (2021). Article ADS PubMed PubMed Central CAS Google Scholar Mohanty, A. et al. Reconfigurable nanophotonic silicon probes for sub- …